Tipping solutions: Emerging 3D nano-fabrication/-imaging technologies

Seniutinas, G; Balčytis, A; Reklaitis, I; Chen, F; Davis, J; David, C; Juodkazis, S

Tipping solutions: Emerging 3D nano-fabrication/-imaging technologies

Seniutinas, G Balčytis, A Reklaitis, I Chen, F Davis, J David, C Juodkazis, S

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Publication Type:: Journal Article
Citation:: Nanophotonics, 2017, 6 (5), pp. 923 - 941
Issue Date:: 2017-08-28

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Field	Value	Language
dc.contributor.author	Seniutinas, G	en_US
dc.contributor.author	Balčytis, A	en_US
dc.contributor.author	Reklaitis, I	en_US
dc.contributor.author	Chen, F	en_US
dc.contributor.author	Davis, J	en_US
dc.contributor.author	David, C	en_US
dc.contributor.author	Juodkazis, S	en_US
dc.date.issued	2017-08-28	en_US
dc.identifier.citation	Nanophotonics, 2017, 6 (5), pp. 923 - 941	en_US
dc.identifier.uri	http://hdl.handle.net/10453/124531
dc.description.abstract	© 2017, Gediminas Seniutinas, Saulius Juodkazis et al. The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1-100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.	en_US
dc.relation.ispartof	Nanophotonics	en_US
dc.relation.isbasedon	10.1515/nanoph-2017-0008	en_US
dc.title	Tipping solutions: Emerging 3D nano-fabrication/-imaging technologies	en_US
dc.type	Journal Article
utslib.citation.volume	5	en_US
utslib.citation.volume	6	en_US
utslib.for	0301 Analytical Chemistry	en_US
utslib.for	0205 Optical Physics	en_US
utslib.for	0906 Electrical and Electronic Engineering	en_US
utslib.for	1007 Nanotechnology	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	closed_access
pubs.issue	5	en_US
pubs.publication-status	Published	en_US
pubs.volume	6	en_US

Abstract:

© 2017, Gediminas Seniutinas, Saulius Juodkazis et al. The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1-100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/124531