Fabrication of free-standing silicon carbide on silicon microstructures via massive silicon sublimation

Amjadipour, M; MacLeod, J; Motta, N; Iacopi, F

Fabrication of free-standing silicon carbide on silicon microstructures via massive silicon sublimation

Amjadipour, M MacLeod, J Motta, N Iacopi, F

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Publisher:: American Vacuum Society
Publication Type:: Journal Article
Citation:: Journal of Vacuum Science & Technology B, 2020, 38, (6), pp. 062202-062202
Issue Date:: 2020-11

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Field	Value	Language
dc.contributor.author	Amjadipour, M
dc.contributor.author	MacLeod, J
dc.contributor.author	Motta, N
dc.contributor.author	Iacopi, F https://orcid.org/0000-0002-3196-0990
dc.date.accessioned	2020-10-07T02:40:53Z
dc.date.available	2020-10-07T02:40:53Z
dc.date.issued	2020-11
dc.identifier.citation	Journal of Vacuum Science & Technology B, 2020, 38, (6), pp. 062202-062202
dc.identifier.issn	2166-2746
dc.identifier.issn	2166-2754
dc.identifier.uri	http://hdl.handle.net/10453/143119
dc.language	en
dc.publisher	American Vacuum Society
dc.relation.ispartof	Journal of Vacuum Science & Technology B
dc.relation.isbasedon	10.1116/6.0000490
dc.rights	info:eu-repo/semantics/embargoedAccess
dc.subject	0401 Atmospheric Sciences, 0901 Aerospace Engineering, 0912 Materials Engineering
dc.subject.classification	Applied Physics
dc.title	Fabrication of free-standing silicon carbide on silicon microstructures via massive silicon sublimation
dc.type	Journal Article
utslib.citation.volume	38
utslib.for	0401 Atmospheric Sciences
utslib.for	0901 Aerospace Engineering
utslib.for	0912 Materials Engineering
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
pubs.organisational-group	/University of Technology Sydney
utslib.copyright.status	open_access	*
utslib.copyright.embargo	2021-11-30T00:00:00+1000Z
dc.date.updated	2020-10-07T02:40:37Z
pubs.issue	6
pubs.publication-status	Accepted
pubs.volume	38
utslib.citation.issue	6

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http://hdl.handle.net/10453/143119