Effect of crystal orientation on liquid phase performance of piezoelectric-on-silicon elliptical plate resonators

Begum, H; Qian, J; Lee, JEY

Effect of crystal orientation on liquid phase performance of piezoelectric-on-silicon elliptical plate resonators

Begum, H Qian, J Lee, JEY

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Publisher:: Elsevier
Publication Type:: Journal Article
Citation:: Sensors and Actuators A: Physical, 2022, 340, pp. 113548
Issue Date:: 2022-06-16

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Field	Value	Language
dc.contributor.author	Begum, H
dc.contributor.author	Qian, J
dc.contributor.author	Lee, JEY
dc.date.accessioned	2023-07-24T00:11:53Z
dc.date.available	2023-07-24T00:11:53Z
dc.date.issued	2022-06-16
dc.identifier.citation	Sensors and Actuators A: Physical, 2022, 340, pp. 113548
dc.identifier.issn	0924-4247
dc.identifier.uri	http://hdl.handle.net/10453/171624
dc.description.abstract	Various microelectromechanical (MEM) resonator topologies have been proposed for liquid phase sensing applications. Low liquid phase motional resistance (Rm) and moderately high liquid phase quality factor (Q) are critical to the performance of oscillators based on these resonators for real-time frequency tracking in sensing applications. We recently described a new topology we call the elliptical plate resonator EPR that delivers the lowest Rm after normalizing for area (which impacts mass sensitivity as a tradeoff for lower Rm). In this work, we show that further significant gains in performance can be made by choice of device alignment to the silicon crystal axis (< 110 > direction vs. < 100 > direction). We compare the liquid phase performance between the two orientations for a range of geometrical ratios defining the ellipse of the device. We show that the orientation makes a notable difference on trends in liquid phase Q and Rm. By aligning the EPR to the < 110 > direction, we demonstrate a liquid phase Q of 310 and Rm of 2.5 kΩ. Normalizing for area (Rm×A) to express the tradeoff between mass sensitivity and electrical performance in relation to device area, we report an Rm×A of 0.25 kΩ.mm2. We also show that these gains in liquid phase Rm and Q translate into significant lowering of the Allan deviation when these devices are embedded in close loop to track their frequency in real time with water loaded on the device as expected in liquid phase sensing applications.
dc.language	en
dc.publisher	Elsevier
dc.relation.ispartof	Sensors and Actuators A: Physical
dc.relation.isbasedon	10.1016/j.sna.2022.113548
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject	0906 Electrical and Electronic Engineering, 0912 Materials Engineering, 0913 Mechanical Engineering
dc.subject.classification	Nanoscience & Nanotechnology
dc.subject.classification	4008 Electrical engineering
dc.subject.classification	4009 Electronics, sensors and digital hardware
dc.subject.classification	4017 Mechanical engineering
dc.title	Effect of crystal orientation on liquid phase performance of piezoelectric-on-silicon elliptical plate resonators
dc.type	Journal Article
utslib.citation.volume	340
utslib.for	0906 Electrical and Electronic Engineering
utslib.for	0912 Materials Engineering
utslib.for	0913 Mechanical Engineering
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
utslib.copyright.status	closed_access	*
dc.date.updated	2023-07-24T00:11:49Z
pubs.publication-status	Published
pubs.volume	340

Abstract:

Various microelectromechanical (MEM) resonator topologies have been proposed for liquid phase sensing applications. Low liquid phase motional resistance (Rm) and moderately high liquid phase quality factor (Q) are critical to the performance of oscillators based on these resonators for real-time frequency tracking in sensing applications. We recently described a new topology we call the elliptical plate resonator EPR that delivers the lowest Rm after normalizing for area (which impacts mass sensitivity as a tradeoff for lower Rm). In this work, we show that further significant gains in performance can be made by choice of device alignment to the silicon crystal axis (< 110 > direction vs. < 100 > direction). We compare the liquid phase performance between the two orientations for a range of geometrical ratios defining the ellipse of the device. We show that the orientation makes a notable difference on trends in liquid phase Q and Rm. By aligning the EPR to the < 110 > direction, we demonstrate a liquid phase Q of 310 and Rm of 2.5 kΩ. Normalizing for area (Rm×A) to express the tradeoff between mass sensitivity and electrical performance in relation to device area, we report an Rm×A of 0.25 kΩ.mm2. We also show that these gains in liquid phase Rm and Q translate into significant lowering of the Allan deviation when these devices are embedded in close loop to track their frequency in real time with water loaded on the device as expected in liquid phase sensing applications.

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http://hdl.handle.net/10453/171624