Directed deposition and etching of functional nanostructures using electron beam and plasma irradiation

Lobo, C

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Field	Value	Language
dc.contributor.author	Lobo, C https://orcid.org/0000-0002-2746-1363
dc.date	2017-04-02
dc.date.accessioned	2023-12-13T02:24:22Z
dc.date.available	2023-12-13T02:24:22Z
dc.date.issued	2017-04-02
dc.identifier.citation	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 253
dc.identifier.issn	0065-7727
dc.identifier.uri	http://hdl.handle.net/10453/173819
dc.language	en
dc.publisher	AMER CHEMICAL SOC
dc.relation.ispartof	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
dc.relation.ispartof	253rd National Meeting of the American-Chemical-Society (ACS) on Advanced Materials, Technologies, Systems, and Processes
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Directed deposition and etching of functional nanostructures using electron beam and plasma irradiation
dc.type	Conference Proceeding
utslib.citation.volume	253
utslib.location.activity	CA, San Francisco
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	closed_access	*
dc.date.updated	2023-12-13T02:24:20Z
pubs.finish-date	2017-04-06
pubs.publication-status	Published
pubs.start-date	2017-04-02
pubs.volume	253

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