Flexible Tactile Sensing Using PDMS/TiO<inf>2</inf> Based Capacitor with MOSFET Structure

Publisher:
IEEE
Publication Type:
Conference Proceeding
Citation:
Proceedings of IEEE Sensors, 2024, 00
Issue Date:
2024-01-01
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In this paper, we present a flexible capacitive tactile sensor based on a polydimethylsiloxane (PDMS) elastomer, which is well-suited for a wide range of applications. The sensor incorporates an n-channel depletion-mode MOSFET to achieve an extended gate architecture. To enhance the sensing performance, TiO2 nanoparticles are incorporated as nanofillers, resulting in an improved dielectric material ideal for highly sensitive capacitive pressure and tactile sensors. The 99PDMS-01TiO2 nanocomposite (comprising 99 wt % PDMS and 1 wt % TiO2) is utilized for promising flexible tactile sensor applications due to the synergistic effects between the PDMS matrix and TiO2 nanoparticles, which enhance both the mechanical and sensing properties of the composite. The fabricated sensor exhibits a sensitivity of 30 μA/kPa within the range of 0-10.5 kPa and a sensitivity of 9 μA/kPa in the range of 10.5-30 kPa.
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