High quality SiC microdisk resonators fabricated from monolithic epilayer wafers

Magyar, AP; Bracher, D; Lee, JC; Aharonovich, I; Hu, EL

High quality SiC microdisk resonators fabricated from monolithic epilayer wafers

Magyar, AP Bracher, D Lee, JC Aharonovich, I

Hu, EL

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Publication Type:: Journal Article
Citation:: Applied Physics Letters, 2014, 104 (5)
Issue Date:: 2014-01-01

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Field	Value	Language
dc.contributor.author	Magyar, AP	en_US
dc.contributor.author	Bracher, D	en_US
dc.contributor.author	Lee, JC	en_US
dc.contributor.author	Aharonovich, I https://orcid.org/0000-0003-4304-3935	en_US
dc.contributor.author	Hu, EL	en_US
dc.date.issued	2014-01-01	en_US
dc.identifier.citation	Applied Physics Letters, 2014, 104 (5)	en_US
dc.identifier.issn	0003-6951	en_US
dc.identifier.uri	http://hdl.handle.net/10453/33037
dc.description.abstract	The exquisite mechanical properties of SiC have made it an important industrial material with applications in microelectromechanical devices and high power electronics. Recently, the optical properties of SiC have garnered attention for applications in photonics, quantum information, and spintronics. This work demonstrates the fabrication of microdisks formed from a p-N SiC epilayer material. The microdisk cavities fabricated from the SiC epilayer material exhibit quality factors of as high as 9200 and the approach is easily adaptable to the fabrication of SiC-based photonic crystals and other photonic and optomechanical devices. © 2014 AIP Publishing LLC.	en_US
dc.relation.ispartof	Applied Physics Letters	en_US
dc.relation.isbasedon	10.1063/1.4863932	en_US
dc.subject.classification	Applied Physics	en_US
dc.title	High quality SiC microdisk resonators fabricated from monolithic epilayer wafers	en_US
dc.type	Journal Article
utslib.citation.volume	5	en_US
utslib.citation.volume	104	en_US
utslib.for	0205 Optical Physics	en_US
utslib.for	1007 Nanotechnology	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	02 Physical Sciences	en_US
utslib.for	09 Engineering	en_US
utslib.for	10 Technology	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
utslib.copyright.status	open_access
pubs.issue	5	en_US
pubs.publication-status	Published	en_US
pubs.volume	104	en_US

Abstract:

The exquisite mechanical properties of SiC have made it an important industrial material with applications in microelectromechanical devices and high power electronics. Recently, the optical properties of SiC have garnered attention for applications in photonics, quantum information, and spintronics. This work demonstrates the fabrication of microdisks formed from a p-N SiC epilayer material. The microdisk cavities fabricated from the SiC epilayer material exhibit quality factors of as high as 9200 and the approach is easily adaptable to the fabrication of SiC-based photonic crystals and other photonic and optomechanical devices. © 2014 AIP Publishing LLC.

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http://hdl.handle.net/10453/33037