Growth and characterisation of birefringent films on textured silicon substrates

Walsby, ED; Arnold, M; Wu, QH; Hodgkinson, IJ; Blaikie, RJ

Growth and characterisation of birefringent films on textured silicon substrates

Walsby, ED Arnold, M

Wu, QH Hodgkinson, IJ Blaikie, RJ

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Publication Type:: Journal Article
Citation:: Microelectronic Engineering, 2005, 78-79 (1-4), pp. 436 - 441
Issue Date:: 2005-03-01

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Field	Value	Language
dc.contributor.author	Walsby, ED	en_US
dc.contributor.author	Arnold, M https://orcid.org/0000-0003-4164-0242	en_US
dc.contributor.author	Wu, QH	en_US
dc.contributor.author	Hodgkinson, IJ	en_US
dc.contributor.author	Blaikie, RJ	en_US
dc.date.issued	2005-03-01	en_US
dc.identifier.citation	Microelectronic Engineering, 2005, 78-79 (1-4), pp. 436 - 441	en_US
dc.identifier.issn	0167-9317	en_US
dc.identifier.uri	http://hdl.handle.net/10453/9356
dc.description.abstract	The effects of textured substrates on the serial bi-deposition (SBD) technique of thin film growth have been investigated. Obliquely deposited coatings exhibit optical anisotropy as a consequence of the internal nanostructure developed during self-shadowed growth, which should be enhanced by growth onto textured substrates. We examine the growth and some subsequent optical properties of SBD coatings deposited obliquely onto lithographically- defined fine line and dot arrays with periods as small as 100 nm. Reflection retardance optical measurements show clear differences over a range of wavelengths for the structures in the patterned areas. © 2005 Elsevier B.V. All rights reserved.	en_US
dc.relation.ispartof	Microelectronic Engineering	en_US
dc.relation.isbasedon	10.1016/j.mee.2004.12.055	en_US
dc.subject.classification	Applied Physics	en_US
dc.title	Growth and characterisation of birefringent films on textured silicon substrates	en_US
dc.type	Journal Article
utslib.citation.volume	1-4	en_US
utslib.citation.volume	78-79	en_US
utslib.for	0906 Electrical and Electronic Engineering	en_US
utslib.for	0204 Condensed Matter Physics	en_US
utslib.for	0299 Other Physical Sciences	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	closed_access
pubs.issue	1-4	en_US
pubs.publication-status	Published	en_US
pubs.volume	78-79	en_US

Abstract:

The effects of textured substrates on the serial bi-deposition (SBD) technique of thin film growth have been investigated. Obliquely deposited coatings exhibit optical anisotropy as a consequence of the internal nanostructure developed during self-shadowed growth, which should be enhanced by growth onto textured substrates. We examine the growth and some subsequent optical properties of SBD coatings deposited obliquely onto lithographically- defined fine line and dot arrays with periods as small as 100 nm. Reflection retardance optical measurements show clear differences over a range of wavelengths for the structures in the patterned areas. © 2005 Elsevier B.V. All rights reserved.

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http://hdl.handle.net/10453/9356